Thermodynamic Modeling of the Deposition of Nickel-Containing Films from the Gas Phase

Thermodynamic modeling of vapor deposition in the Ni–O–C–H–(Ar) system was performed at temperatures of 100–800°C and a pressure of 0.1 Torr. The process for the production of nickel-containing films from a mixture of nickelocene or nickel acetylacetonate with oxygen and argon (as a carrier gas) by vapor deposition was modeled. The corresponding CVD diagrams were constructed. The possibility of using such mixtures for producing composite films of different compositions was shown. The dependence of the content of individual phases was studied. The formation of Ni + C and Ni + NiO phase complexes, as well as individual Ni and NiO phases, can be expected in these systems under appropriate conditions. It was established that the graphite-containing complex forms in the range of relatively low temperatures. The ranges of conditions for the formation of phases and phase complexes based on the mixtures were determined.