Computational Study of an Inductively Coupled Plasma with Different Copper Coil Designs and Dielectric Thickness

This paper presents the physical characteristics of 2D and 3D simulation of inductively coupled plasma (ICP) discharge with varying designs of copper coil. The inductive coil gaps are arranged at different distances and their physical properties are investigated in an argon environment. The optimal coil gap distance is determined to yield the highest electron density, electron temperature, and macroscopic gas temperature. Subsequently, the inductive coils on the quartz tube are repositioned without altering the gap between the coils, and the dielectric thickness is changed for optimized design then discharge properties are examined in an argon atmosphere. The maximum electron density, and macroscopic gas temperature are then obtained in the most advantageous position and dielectric thicknesses for the discharge process.