Peculiarities of the Formation of Dy/Co Periodic Multilayer Systems upon Magnetron Sputtering

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发表日期：

2024年10月1日

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G. V. Prutskov,
I. A. Subbotin,
E. A. Kravtsov,
M. V. Makarova,
M. A. Milyaev,
E. M. Pashaev

摘要

Abstract

X-ray and magnetometry methods are used to show that, during magnetron sputtering of Dy/Co periodic multilayer systems, the DyCo₂ and DyCo₃ intermetallics form. The main reason for the phase formation of various intermetallics is the structural state of buffer layer, namely, its crystalline and amorphous state in the case of crystalline and glass substrate, respectively.