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Abstract <p>The dispersions of the refractive index and absorption coefficient were determined for monolayers of titanium oxide and silicon oxide. The design of a multilayer antireflective optical coating for these materials in the spectral range of 0.4–8 μm has been developed. Modes for applying coating using ion-beam sputtering onto a semiconductor substrate have been selected. The optical characteristics of a four-layer interference coating with antireflection coating on a ZGP substrate were measured in the range of 2097 nm and 3.5–5 μm, with residual reflection <i>R</i> ≤ 0.2% and <i>R</i> ≤ 2.1%, respectively. Tests were carried out for adhesion and abrasion of the coating in accordance with GOST.</p>

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Development of Antireflective Interference Coatings in the Range of 3–5 µm for Optical Parametric Oscillators Based on ZnGeP2

  • 期刊论文

  • 发表日期：

    2025年6月11日

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  • N. N. Yudin,
  • M. M. Zinovev,
  • S. N. Podzyvalov,
  • E. S. Slyunko,
  • V. S. Kuznetsov,
  • A. B. Lysenko,
  • A. Yu. Kalsin,
  • M. M. Kulesh,
  • D. V. Vlasov

摘要

Abstract

The dispersions of the refractive index and absorption coefficient were determined for monolayers of titanium oxide and silicon oxide. The design of a multilayer antireflective optical coating for these materials in the spectral range of 0.4–8 μm has been developed. Modes for applying coating using ion-beam sputtering onto a semiconductor substrate have been selected. The optical characteristics of a four-layer interference coating with antireflection coating on a ZGP substrate were measured in the range of 2097 nm and 3.5–5 μm, with residual reflection R ≤ 0.2% and R ≤ 2.1%, respectively. Tests were carried out for adhesion and abrasion of the coating in accordance with GOST.