Vibration Analysis and Signal Detection for the Cross-Shaped Micro Resonator

Resonant sensors are extensively utilized in engineering applications owing to simple mechanical structure, high sensitivity, and reliable stability. To further enhance the performance of resonant sensors, a common approach in industrial production is reducing the size of components to increase sensitivity. However, the reduction in size leads to the weaker output signals, which increasing the difficulty of signal detection. To solve this problem, this paper proposed a cross-shaped resonator to enhance the output signal by increasing the electrode plate area. This approach was expected to alleviate the signal attenuation dilemma associated with miniaturization, thereby advancing sensor performance in various engineering applications. In the sensor design, the vibration characteristics analysis of the model as a continuous system was a key step in determining design parameters. The vibration equation of the continuous system for this structure was established and a comprehensive solution methodology was proposed. Furthermore, the natural frequency and amplitude-frequency characteristic curves of the system were investigated to ensure precise performance prediction. Using advanced micromachining techniques, we successfully fabricated a cross-shaped micro resonator. The subsequent experimental tests confirmed the theoretical correctness and practical feasibility of our design. The results provide valuable guidance and insights for optimizing the design and performance of resonant sensors.