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Abstract <p>A comprehensive study of InGaZnO<sub>4</sub>, InGaZn<sub>3</sub>O<sub>6</sub>, and InGaZn<sub>4</sub>O<sub>7</sub> indium–gallium–zinc oxides (IGZO) prepared by the solid-phase synthesis is reported. The preparation technique is described in detail. The obtained samples are characterized by powder XRD, electron microscopy, inductively coupled plasma atomic emission spectroscopy (ICP-AES), IR and Raman spectroscopy methods. The vibrational spectra data are compared with the structure and composition of the samples.</p>

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Structure, Morphology, and Spectroscopy of Oxides in the In–Ga–Zn–O System

  • 期刊论文

  • 发表日期：

    2025年11月1日

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  • D. E. Zhivulin,
  • A. I. Kovalev,
  • D. P. Sherstyuk,
  • T. V. Batmanova,
  • G. M. Zirnik,
  • D. A. Vinnik

摘要

Abstract

A comprehensive study of InGaZnO4, InGaZn3O6, and InGaZn4O7 indium–gallium–zinc oxides (IGZO) prepared by the solid-phase synthesis is reported. The preparation technique is described in detail. The obtained samples are characterized by powder XRD, electron microscopy, inductively coupled plasma atomic emission spectroscopy (ICP-AES), IR and Raman spectroscopy methods. The vibrational spectra data are compared with the structure and composition of the samples.