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Abstract <p>The results of studies on the deposition of refractory metal coatings on the surface of glass slides are presented. The growth rate and structure of deposited coatings were studied depending on the radiation intensity and the distance between the target and the substrate. The LG 929A laser system based on a solid-state pulsed laser with a wavelength of λ = 1.06 µm, repetition rate of 10 Hz, and pulse duration of 9 ns was used as a source of radiation. The results of the study into the influence of pressure on the ablation rate (growth of coating thickness) in the range of 0.001–1 Torr are presented. A linear dependence of the thickness of the applied film on the intensity of laser radiation was obtained. The optimal distance between the target and the substrate, as well as the threshold and optimal intensities of laser radiation, were determined. It has been shown that the spatial distribution of the tungsten film thickness on a grade 3 (St3) steel substrate obtained by us is in good agreement with the results obtained using the optical shear interferometry method using the MII-4 interferometer.</p>

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Results of Research on Thin Coating Deposition Modes of Refractory Metals Using Laser Ablation

  • 期刊论文

  • 发表日期：

    2025年12月1日

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  • V. A. Barsuk,
  • S. V. Gvozdev,
  • A. D. Mikhailov,
  • S. P. Pavlov,
  • N. E. Sarkarov,
  • A. S. Shchedrov,
  • D. O. Chernov

摘要

Abstract

The results of studies on the deposition of refractory metal coatings on the surface of glass slides are presented. The growth rate and structure of deposited coatings were studied depending on the radiation intensity and the distance between the target and the substrate. The LG 929A laser system based on a solid-state pulsed laser with a wavelength of λ = 1.06 µm, repetition rate of 10 Hz, and pulse duration of 9 ns was used as a source of radiation. The results of the study into the influence of pressure on the ablation rate (growth of coating thickness) in the range of 0.001–1 Torr are presented. A linear dependence of the thickness of the applied film on the intensity of laser radiation was obtained. The optimal distance between the target and the substrate, as well as the threshold and optimal intensities of laser radiation, were determined. It has been shown that the spatial distribution of the tungsten film thickness on a grade 3 (St3) steel substrate obtained by us is in good agreement with the results obtained using the optical shear interferometry method using the MII-4 interferometer.