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Abstract— <p>This paper presents the development of a piezo-driven calibration device for force sensors. A piezoelectric actuator is used to generate the original driving force, and a two-stage hybrid displacement amplifier can adjust the driving displacement and loaded force into the desirable range for sensor calibration. A force tester is set on the output end of the amplifier to load and monitor the calibration force. The features of the displacement amplifier and force tester are theoretically modeled and verified by finite element analysis (FEA). A laboratorial prototype is realized by assembling the commercial piezoelectric actuator into the displacement amplifier fabricated using wire electrical discharge machining and adhering metallic strain gauge onto the sensing beam of the force tester. The experimental results demonstrate that the device can output a displacement of 666 μm under the 130 V driving voltage and successfully realize the 0.2 N-range sensor calibration with the error of 0.56%.</p>

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Design and Analysis of a Piezo-driven Calibration Device for Force Sensor

  • 期刊论文

  • 发表日期：

    2025年8月1日

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  • Jizhou Han,
  • Yan Liu,
  • Peishuo Jiang,
  • Fei Kou,
  • Xiang Cheng,
  • Weidong Wang

摘要

Abstract—

This paper presents the development of a piezo-driven calibration device for force sensors. A piezoelectric actuator is used to generate the original driving force, and a two-stage hybrid displacement amplifier can adjust the driving displacement and loaded force into the desirable range for sensor calibration. A force tester is set on the output end of the amplifier to load and monitor the calibration force. The features of the displacement amplifier and force tester are theoretically modeled and verified by finite element analysis (FEA). A laboratorial prototype is realized by assembling the commercial piezoelectric actuator into the displacement amplifier fabricated using wire electrical discharge machining and adhering metallic strain gauge onto the sensing beam of the force tester. The experimental results demonstrate that the device can output a displacement of 666 μm under the 130 V driving voltage and successfully realize the 0.2 N-range sensor calibration with the error of 0.56%.