Scholarlink

Abstract <p>The design and operating principle of a gas-circulation system used as a target for a gas-jet laser-plasma source are described. The need for such a system is due to the desire to reduce gas consumption while maintaining the performance of the radiation source. The circulation system allows the same volume of gas to be used as a target multiple times. The article presents the design of the system as well as the results of trial operation and assessment of the tightness of the designed system and the operating time on one gas filling.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Gas-Circulation System for Forming a Gas-Jet Target in a Vacuum Chamber of a Laser-Plasma Source

  • 期刊论文

  • 发表日期：

    2025年4月1日

查看全文
  • V. E. Guseva,
  • A. N. Nechai,
  • A. A. Perekalov,
  • N. I. Chkhalo

摘要

Abstract

The design and operating principle of a gas-circulation system used as a target for a gas-jet laser-plasma source are described. The need for such a system is due to the desire to reduce gas consumption while maintaining the performance of the radiation source. The circulation system allows the same volume of gas to be used as a target multiple times. The article presents the design of the system as well as the results of trial operation and assessment of the tightness of the designed system and the operating time on one gas filling.