Modern Combined Ultrahigh Vacuum Pumps for the SRF “SKIF”

At present, combined UHV pumps, i.e., pumps based on nonevaporable getters and sputter ion pumps in one housing, are widely applied in vacuum systems of charged particle accelerators. This type of pump will be used in the 4+ generation synchrotron at the Siberian Ring Photon Source (SKIF) shared resource center (facility). A prototype of the combined pump with a hydrogen pumping speed of 1000 L/s has been manufactured and tested at the Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences (BINP SB RAS). This paper describes the design of the pump and testing results for various gases.