Measurement and Active Control of Low Frequency Micro-Vibration Based on Dynamic Force Sensor

Space precision payloads and microgravity science experiments are easily affected by low frequency micro-vibrations. The measurement and control of low frequency micro-vibrations are still critically needed. To overcome the measurement and control problem of low frequency micro-vibrations, a low frequency dynamic force sensor (LFDFS) and an active vibration control method are developed. Based on the LFDFS, an active vibration isolation platform is built to validate the low frequency measurement performance of the sensor. The dynamic modeling and simulation studies of the vibration isolation platform are further implemented. A composite control method employing both feedforward and feedback is proposed. Finally, the experimental results verify the performance of the developed LFDFS and the active vibration isolation effectiveness of the proposed composite controller.