Small Scale Emitter for an Excilamp with the Wavelength of 126 nm

A compact emitter of a relatively simple design with argon filling has been developed, which can be used to create VUV and UV excilamps. Its characteristics were investigated. To increase the radiation power on the second continuum of argon dimers (λ ≈ 126 nm), a method based on gas flow through the discharge region was used. At an excitation pulse repetition rate of 96 kHz, the radiation power density at λ ≈ 126 nm behind the output window made of MgF₂ greater than 5 mW/cm² was obtained. It is shown that argon flow at a rate of 0.5–1 L/s through the discharge region makes it possible to stabilize the average power of VUV radiation at a level no worse than 2%.