Abstract <p>The paper presents numerical studies of plasma parameters in a microwave discharge in a surfatron in argon at atmospheric pressure. The main plasma parameters are presented for different values of the input discharge power and taking into account the gas flow, as well as the dynamics of changes in plasma parameters during the discharge establishment process.</p>

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Simulation of Microwave Discharge in a Surfatron in Argon Flow at Atmospheric Pressure

  • A. I. Saifutdinov,
  • E. V. Kustova,
  • A. A. Galiev,
  • A. A. Saifutdinova

摘要

Abstract

The paper presents numerical studies of plasma parameters in a microwave discharge in a surfatron in argon at atmospheric pressure. The main plasma parameters are presented for different values of the input discharge power and taking into account the gas flow, as well as the dynamics of changes in plasma parameters during the discharge establishment process.