Computational Analysis of a GEC-Based ICP Reactor Operating with Argon: Power-Dependent Plasma Characteristics
摘要
The GEC cell, officially launched by the National Institute of Standards and Technology (NIST), with the primary objective of creating a highly standardized platform that would facilitate experimental and modeling studies associated with the complex phenomenon of discharges in a wide range of laboratories around the globe. Under the premise of the current study, the plasma maintenance is achieved by the advanced technique of inductive heating, wherein the use of alternate electromagnetic fields is employed to sustain the conditions required for plasma generation. Under the mentioned system, the Reference Cell has been developed to function as an inductively-coupled plasma, allowing the researchers to investigate the dynamics and characteristics of the plasma under controlled conditions. The power input to the inductive coils is systematically changed in three steps—2000, 2500, and 3000 W—thereby allowing the comprehensive study of the plasma parameters, including the crucial parameters like the electron density, the norm of the electric field, the configuration of the magnetic field, number density, coil resistance, and many other related parameters, which were meticulously computed using advanced simulation studies.