Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach
摘要
Abstract
The paper presents the results of predicting the characteristics of a inductive coupled radio frequency discharge at low pressure in a one-dimensional approximation using a perceptron. The electric and magnetic field strengths of the ICRF discharge were used as prediction characteristics. The prediction results obtained using the perceptron were compared with the model data of the ICRF discharge. The comparative results showed that the trained perceptron can be used to predict the characteristics of the ICRF discharge at those points of study where it is problematic to obtain a solution due to the convergence of mathematical models.