Calculations of ICRF Intermediate Pressure Plasma Flow with Influence of Non-Maxwellian EEDF

The calculations by mathematical model of the RF plasma flow at a pressure of 13.3–133 Pa at Knudsen \({\text{Kn}} \leqslant 0.1\) is performed. The model is based on Navier–Stokes equations together with the continuum model for electron and metastable components of the RF plasma taking into account non-maxwellian EEDF. Results of plasma flow calculations for electrons density, distributions of electron temperature and calculations of parameters of electromagnetic field are presented.