A Two-Dimensional Axisymmetric Model for the Low Pressure Inductively Coupled RF Plasma with Gas Flow

A two-dimensional axisymmetric plasma model of a radio frequency induction discharge of low pressure (13–133 Pa) with gas blowing is presented. The model includes the Navier−Stokes equations, the continuity equations for ions, electrons, and metastable atoms, the equations for the conservation of energy of electrons and atoms in the ground state, and the Maxwell equations with the corresponding boundary conditions. A feature of the model is that the initial approximation for the concentration of electrons is chosen by solving a one-dimensional eigenvalue problem. The results of numerical calculations of the characteristics of RF discharge with gas blowing are presented.