Plasma Chemical Synthesis of Nanodiamonds and Diamond-Like Nanofilms
摘要
Abstract
The methods of artificial growth of nanodiamonds and deposition of diamond-like coatings are studied in this work. The features of existing synthesis methods of nanodiamonds and diamond-like structures are disclosed. Application of diamond-like coatings on surfaces of various conducting and dielectric materials, including glass, silicon and aluminium surfaces, is carried out.