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<p>Self-powered microelectronics systems generate energy from ambient sources like light, heat or mechanical vibrations using on-chip devices, and the overall system is designed to minimize its power footprint. These systems can be used to build systems that operate autonomously without an external power source. Such systems are of particular interest in edge computing, internet of things devices and remote-sensing technologies, for which replacing or recharging batteries is impractical. Here we report on a monolithic three-dimensional integrated circuit that stacks graphene transistors in the top tier for low-power chemical sensing, complementary logic circuits based on n-type monolayer molybdenum disulfide (MoS<sub>2</sub>) and p-type bilayer tungsten diselenide (WSe<sub>2</sub>) in the middle tier for low-power computing, and an on-chip silicon photovoltaic module in the bottom tier to harvest ambient light. The integrated system, which operates solely on ambient light, can distinguish between various chemical solutions and generate corresponding digital codes in a fully sustainable manner. We also demonstrate the dense integration of data and power vias across the tiers and show that the intertier separation can be reduced to 50 nm.</p>

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Monolithic three-dimensional integration of heterogeneous electronics for self-powered sensing and processing

  • 期刊论文

  • 发表日期：

    2026年6月23日

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  • Subir Ghosh,
  • Pranavram Venkatram,
  • Harikrishnan Ravichandran,
  • Rishikesh T. Nair,
  • Yongwen Sun,
  • Lei Ding,
  • Chen Chen,
  • Joan M. Redwing,
  • Yang Yang,
  • Saptarshi Das

摘要

Self-powered microelectronics systems generate energy from ambient sources like light, heat or mechanical vibrations using on-chip devices, and the overall system is designed to minimize its power footprint. These systems can be used to build systems that operate autonomously without an external power source. Such systems are of particular interest in edge computing, internet of things devices and remote-sensing technologies, for which replacing or recharging batteries is impractical. Here we report on a monolithic three-dimensional integrated circuit that stacks graphene transistors in the top tier for low-power chemical sensing, complementary logic circuits based on n-type monolayer molybdenum disulfide (MoS2) and p-type bilayer tungsten diselenide (WSe2) in the middle tier for low-power computing, and an on-chip silicon photovoltaic module in the bottom tier to harvest ambient light. The integrated system, which operates solely on ambient light, can distinguish between various chemical solutions and generate corresponding digital codes in a fully sustainable manner. We also demonstrate the dense integration of data and power vias across the tiers and show that the intertier separation can be reduced to 50 nm.