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<p>Digital image sensors can capture real-world information and are widely used in machine vision and biomedical imaging. However, despite improvements in pixel miniaturization and pixel density, the spatial bandwidth product, which defines the maximum amount of spatial information that can be recorded, of such sensors is insufficient for the multidimensional sensing of light fields and spectra. Further reduction in pixel size is also restricted due to signal-to-noise ratio issues, suggesting that a more generalized approach is needed to increase the spatial bandwidth product. Here we report a chip-scale image sensor that is integrated with a microelectromechanical system actuator. By precisely modulating the position of the digital image sensor using the actuator, our sensor can overcome the limitation of pixel size on the sampling period. We build a theoretical model based on Fourier optics to characterize the sensor and fabricate the sensor using micromachining processes. Compared with a sensor without position modulation, the resulting device offers a spatial bandwidth product enhancement of up to 33.7 times. We also show that when integrated into a camera system, our sensor can improve point-like target positioning accuracy and imaging resolution.</p>

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A chip-scale image sensor integrated with a microelectromechanical system actuator

  • 期刊论文

  • 发表日期：

    2026年4月7日

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  • Rongbo Xie,
  • Xiaoqin Liu,
  • Haiyang Zhan,
  • Guozhe Xuan,
  • Fan Zhang,
  • Bingbai Li,
  • Ziqi Mei,
  • Enze Zhou,
  • Rui Ma,
  • Zheng You,
  • Fei Xing,
  • Xiaoguang Zhao

摘要

Digital image sensors can capture real-world information and are widely used in machine vision and biomedical imaging. However, despite improvements in pixel miniaturization and pixel density, the spatial bandwidth product, which defines the maximum amount of spatial information that can be recorded, of such sensors is insufficient for the multidimensional sensing of light fields and spectra. Further reduction in pixel size is also restricted due to signal-to-noise ratio issues, suggesting that a more generalized approach is needed to increase the spatial bandwidth product. Here we report a chip-scale image sensor that is integrated with a microelectromechanical system actuator. By precisely modulating the position of the digital image sensor using the actuator, our sensor can overcome the limitation of pixel size on the sampling period. We build a theoretical model based on Fourier optics to characterize the sensor and fabricate the sensor using micromachining processes. Compared with a sensor without position modulation, the resulting device offers a spatial bandwidth product enhancement of up to 33.7 times. We also show that when integrated into a camera system, our sensor can improve point-like target positioning accuracy and imaging resolution.