<p>Atomically thin, single-crystalline transition metal dichalcogenides grown by chemical vapour deposition on sapphire substrates combine excellent mechanical flexibility with high electronic performance, making them attractive semiconductors for flexible electronics. However, conventional wet-transfer processes used to integrate the materials onto flexible substrates often introduce surface contamination that degrades device performance. Here we report a wafer-scale dry-transfer strategy based on a high-<i>κ</i> dielectric aluminium oxide (Al<sub>2</sub>O<sub>3</sub>) interlayer, enabling the integration of 4-inch single-crystalline molybdenum disulfide (MoS<sub>2</sub>) films onto flexible substrates. The approach requires no contact with polymers or solvents, thus preserving the intrinsic electronic properties of the MoS<sub>2</sub>. Flexible field-effect transistor arrays fabricated using this method exhibit a maximum mobility of 117 cm<sup>2 </sup>V<sup>−1</sup> s<sup>−1</sup>, subthreshold swing of 68.8 mV dec<sup>−1</sup> and on/off ratio of 10<sup>12</sup>, comparable to values achieved on rigid substrates. We further demonstrate MoS<sub>2</sub>-based flexible inverters operating in the subthreshold regime with a gain of 218 and power consumption of 1.4 pW µm<sup>−1</sup>. Finally, we integrate an active-matrix tactile sensing system driven by flexible MoS<sub>2</sub> transistor arrays onto a robotic gripper, providing real-time tactile mapping and object recognition.</p>

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Wafer-scale integration of single-crystalline molybdenum disulfide for flexible electronics using oxide dry transfer

  • Xiang Xu,
  • Yitong Chen,
  • Jichuang Shen,
  • Chen Ji,
  • Qi Huang,
  • Tong Jiang,
  • Han Chen,
  • Huaze Zhu,
  • Yaqing Ma,
  • Hao Wang,
  • Wenhao Li,
  • Dingwei Li,
  • Siyu Zhang,
  • Yan Wang,
  • Bowen Zhu,
  • Wei Kong

摘要

Atomically thin, single-crystalline transition metal dichalcogenides grown by chemical vapour deposition on sapphire substrates combine excellent mechanical flexibility with high electronic performance, making them attractive semiconductors for flexible electronics. However, conventional wet-transfer processes used to integrate the materials onto flexible substrates often introduce surface contamination that degrades device performance. Here we report a wafer-scale dry-transfer strategy based on a high-κ dielectric aluminium oxide (Al2O3) interlayer, enabling the integration of 4-inch single-crystalline molybdenum disulfide (MoS2) films onto flexible substrates. The approach requires no contact with polymers or solvents, thus preserving the intrinsic electronic properties of the MoS2. Flexible field-effect transistor arrays fabricated using this method exhibit a maximum mobility of 117 cm2 V−1 s−1, subthreshold swing of 68.8 mV dec−1 and on/off ratio of 1012, comparable to values achieved on rigid substrates. We further demonstrate MoS2-based flexible inverters operating in the subthreshold regime with a gain of 218 and power consumption of 1.4 pW µm−1. Finally, we integrate an active-matrix tactile sensing system driven by flexible MoS2 transistor arrays onto a robotic gripper, providing real-time tactile mapping and object recognition.