Wafer-scale integration of single-crystalline molybdenum disulfide for flexible electronics using oxide dry transfer
摘要
Atomically thin, single-crystalline transition metal dichalcogenides grown by chemical vapour deposition on sapphire substrates combine excellent mechanical flexibility with high electronic performance, making them attractive semiconductors for flexible electronics. However, conventional wet-transfer processes used to integrate the materials onto flexible substrates often introduce surface contamination that degrades device performance. Here we report a wafer-scale dry-transfer strategy based on a high-κ dielectric aluminium oxide (Al2O3) interlayer, enabling the integration of 4-inch single-crystalline molybdenum disulfide (MoS2) films onto flexible substrates. The approach requires no contact with polymers or solvents, thus preserving the intrinsic electronic properties of the MoS2. Flexible field-effect transistor arrays fabricated using this method exhibit a maximum mobility of 117 cm2 V−1 s−1, subthreshold swing of 68.8 mV dec−1 and on/off ratio of 1012, comparable to values achieved on rigid substrates. We further demonstrate MoS2-based flexible inverters operating in the subthreshold regime with a gain of 218 and power consumption of 1.4 pW µm−1. Finally, we integrate an active-matrix tactile sensing system driven by flexible MoS2 transistor arrays onto a robotic gripper, providing real-time tactile mapping and object recognition.