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<p>Graphene field-effect transistors (GFETs) are attractive transducers for biosensing, but broader use is limited by fabrication complexity, device-to-device variability, stability concerns, and dependence on bulky external reference electrodes. Here, we report a wafer-scale, on-chip-gated GFET array platform that addresses these challenges through engineered passivation and array-level design. Across multiple fabrication runs, we benchmark monolayer-graphene arrays with three passivation schemes (Al<sub>2</sub>O<sub>3</sub>, SU-8, and Al<sub>2</sub>O<sub>3</sub>/SiN<sub><i>x</i></sub>) and quantify the effects of lithographic resist exposure and aging on the liquid-gated response. Using phosphate-buffered saline (PBS) as a model electrolyte, we statistically evaluate Dirac-voltage spread, hysteresis, gate leakage, and stability, identifying Al<sub>2</sub>O<sub>3</sub>/SiN<sub><i>x</i></sub> as the most robust configuration. By varying the ionic strength from PBS 0.001 × to 1 ×, we map the response across relevant Debye lengths. The platform is integrated with PDMS microfluidics and a portable PCB readout, and its intrinsic ionic transduction capability is assessed through proof-of-concept NaCl measurements in deionized water, yielding sensitivities of ~ 70 mV/dec and LoDs down to ~ 3 mM without ion-selective membranes. These results establish a compact, scalable, and electrically stable graphene transducer platform for future integration with portable biofunctionalized sensing assays.</p>

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On-chip gated graphene transistor arrays with engineered passivation for reliable liquid gate operation

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2026年7月20日

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  • Elsa Fuente-Zapico,
  • Paula Martínez-Mazón,
  • Pilar Fernandez Martinez-Rey,
  • Alberto Martínez,
  • Miguel Campanario,
  • Miriam Pareja-Malagon,
  • Carlos Márquez,
  • Francisco Gámiz

摘要

Graphene field-effect transistors (GFETs) are attractive transducers for biosensing, but broader use is limited by fabrication complexity, device-to-device variability, stability concerns, and dependence on bulky external reference electrodes. Here, we report a wafer-scale, on-chip-gated GFET array platform that addresses these challenges through engineered passivation and array-level design. Across multiple fabrication runs, we benchmark monolayer-graphene arrays with three passivation schemes (Al2O3, SU-8, and Al2O3/SiNx) and quantify the effects of lithographic resist exposure and aging on the liquid-gated response. Using phosphate-buffered saline (PBS) as a model electrolyte, we statistically evaluate Dirac-voltage spread, hysteresis, gate leakage, and stability, identifying Al2O3/SiNx as the most robust configuration. By varying the ionic strength from PBS 0.001 × to 1 ×, we map the response across relevant Debye lengths. The platform is integrated with PDMS microfluidics and a portable PCB readout, and its intrinsic ionic transduction capability is assessed through proof-of-concept NaCl measurements in deionized water, yielding sensitivities of ~ 70 mV/dec and LoDs down to ~ 3 mM without ion-selective membranes. These results establish a compact, scalable, and electrically stable graphene transducer platform for future integration with portable biofunctionalized sensing assays.