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<p>With the continuous development of graphene in the field of electronic devices, it is necessary to further develop wafer-scale high-quality graphene preparation technique. A patterning preparation technique for 2-inch wafer-scale transfer-free graphene is reported in this paper, which is innovatively applicable to a variety of substrates. Based on this technique, a 2-inch wafer-scale light-emitting diode (LED) chip with graphene transparent electrodes was fabricated. The results show that the prepared graphene has high quality and uniformity, and plays a good role in improving electrode contact and current spreading. In addition, the LEDs exhibit excellent electrical and optical performance and have a good yield. This wafer-scale graphene preparation technique avoids the damage to graphene caused by the transfer process and the patterning process, which is scalable and suitable for real applications.</p>

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Wafer-scale transfer-free patterned graphene transparent electrodes for GaN-based LEDs: a universal technique towards different substrates

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2025年7月24日

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  • Penghao Tang,
  • Jie Sun,
  • Zaifa Du,
  • Aoqi Fang,
  • Jixin Liu,
  • Rongjing Wang,
  • Guanzhong Pan,
  • Meng Xun,
  • Weiling Guo

摘要

With the continuous development of graphene in the field of electronic devices, it is necessary to further develop wafer-scale high-quality graphene preparation technique. A patterning preparation technique for 2-inch wafer-scale transfer-free graphene is reported in this paper, which is innovatively applicable to a variety of substrates. Based on this technique, a 2-inch wafer-scale light-emitting diode (LED) chip with graphene transparent electrodes was fabricated. The results show that the prepared graphene has high quality and uniformity, and plays a good role in improving electrode contact and current spreading. In addition, the LEDs exhibit excellent electrical and optical performance and have a good yield. This wafer-scale graphene preparation technique avoids the damage to graphene caused by the transfer process and the patterning process, which is scalable and suitable for real applications.