Broadband, low-noise heterojunction photodiodes enabled by simple and scalable transfer of carbon nanowalls
摘要
In this study, we report the fabrication and characterization of broadband photodetectors based on carbon nanowalls (CNWs) synthesized by inductively coupled plasma-enhanced chemical vapor deposition (ICP-PECVD). Vertically oriented CNWs with a highly developed edge structure were transferred onto n-type silicon substrates to form CNWs/n-Si heterojunctions. The devices exhibited clear rectifying behavior and strong photoresponse under white light illumination. Spectral analysis revealed a wide detection range from 300 to 1150 nm, with a maximum responsivity of 0.2 A W− 1 and a specific detectivity of 3 × 1011 Jones. The CNWs/n-Si photodetectors demonstrated low noise equivalent power (NEP) values lie within the range of ~ 10− 12–10− 13 W Hz− 1/2, a fast temporal response (trise/tfall = 17/8 µs), and a cutoff frequency of 53 kHz, confirming their suitability for broad ranges of optoelectronic applications.