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<p>The optical transmission spectra of a series of micro-ring resonators (MRRs) are studied following the implantation of gold (Au) ions and subsequent thermal annealing at temperatures between 500 <InlineEquation ID="IEq1"> <EquationSource Format="TEX">\(^\circ\)</EquationSource> </InlineEquation>C and 700 <InlineEquation ID="IEq2"> <EquationSource Format="TEX">\(^\circ\)</EquationSource> </InlineEquation>C. Whilst we find that this process leads to the ready formation of Au nanoparticles (NPs) partially embedded in the MRR surface, the cavity optical properties, Q-factor and extinction ratio (ER) are severely degraded, for annealing between 500 <InlineEquation ID="IEq3"> <EquationSource Format="TEX">\(^\circ\)</EquationSource> </InlineEquation>C and 600 <InlineEquation ID="IEq4"> <EquationSource Format="TEX">\(^\circ\)</EquationSource> </InlineEquation>C, but recover again for annealing at 650 <InlineEquation ID="IEq5"> <EquationSource Format="TEX">\(^\circ\)</EquationSource> </InlineEquation>C. For an equivalent (control) MRR, which received no Au implantation, thermal annealing alone was also found to degrade the cavity performance.</p>

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Shallow Au implantation into silicon-on-insulator slot ring resonator waveguide devices

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2026年4月3日

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  • Quan-Shan Liu,
  • Maddison Coke,
  • Alexander Lincoln,
  • William Wren,
  • Tim Echtermeyer,
  • Iain Crowe,
  • Richard J. Curry

摘要

The optical transmission spectra of a series of micro-ring resonators (MRRs) are studied following the implantation of gold (Au) ions and subsequent thermal annealing at temperatures between 500 \(^\circ\) C and 700 \(^\circ\) C. Whilst we find that this process leads to the ready formation of Au nanoparticles (NPs) partially embedded in the MRR surface, the cavity optical properties, Q-factor and extinction ratio (ER) are severely degraded, for annealing between 500 \(^\circ\) C and 600 \(^\circ\) C, but recover again for annealing at 650 \(^\circ\) C. For an equivalent (control) MRR, which received no Au implantation, thermal annealing alone was also found to degrade the cavity performance.