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<p>Wafer transfer robots, serving as core components in semiconductor manufacturing equipment, are primarily responsible for the handling of semiconductor wafers. High-speed semiconductor equipment places stringent demands on the dynamic performance of these robots during operation. Existing control algorithms often fail to effectively balance the requirements for stability, precision, and rapid response in robotic motion control. To overcome this limitation, this paper presents a prescribed-time prescribed-performance event-triggered control algorithm. The proposed approach includes three key features: (1) a prescribed-time prescribed-performance function that explicitly constrains the error convergence time via parameter <InlineEquation ID="IEq1"> <EquationSource Format="TEX">\({T}_{1}\)</EquationSource> </InlineEquation>, enabling both fast response and overshoot suppression; (2) an extended state observer for real-time estimation and compensation of unmodeled dynamics and time-varying external disturbances; and (3) a relative threshold-based event-triggered mechanism that significantly reduces the frequency of control signal updates. Based on Lyapunov stability theory, it is proven that the closed-loop system achieves uniform ultimate boundedness despite model uncertainties and time-varying disturbances. Simulation results indicate that under identical disturbance conditions, the proposed algorithm ensures joint position errors converge within 0.0009&#xa0;rad by the prescribed times <InlineEquation ID="IEq2"> <EquationSource Format="TEX">\({T}_{1}\)</EquationSource> </InlineEquation>, with overshoot limited to 1.2% of the relative reference trajectory amplitude, while reducing communication load by more than 64.6%. This method ensures deterministic transient response for wafer transfer robots, significantly improving disturbance rejection and communication efficiency.</p>

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Prescribed-time prescribed-performance event-triggered control algorithm for wafer transfer robots

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2026年4月18日

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  • Bo Xu,
  • Hao Yu,
  • Luyao Yuan,
  • Shuai Huang,
  • JiaCheng Zhou

摘要

Wafer transfer robots, serving as core components in semiconductor manufacturing equipment, are primarily responsible for the handling of semiconductor wafers. High-speed semiconductor equipment places stringent demands on the dynamic performance of these robots during operation. Existing control algorithms often fail to effectively balance the requirements for stability, precision, and rapid response in robotic motion control. To overcome this limitation, this paper presents a prescribed-time prescribed-performance event-triggered control algorithm. The proposed approach includes three key features: (1) a prescribed-time prescribed-performance function that explicitly constrains the error convergence time via parameter \({T}_{1}\) , enabling both fast response and overshoot suppression; (2) an extended state observer for real-time estimation and compensation of unmodeled dynamics and time-varying external disturbances; and (3) a relative threshold-based event-triggered mechanism that significantly reduces the frequency of control signal updates. Based on Lyapunov stability theory, it is proven that the closed-loop system achieves uniform ultimate boundedness despite model uncertainties and time-varying disturbances. Simulation results indicate that under identical disturbance conditions, the proposed algorithm ensures joint position errors converge within 0.0009 rad by the prescribed times \({T}_{1}\) , with overshoot limited to 1.2% of the relative reference trajectory amplitude, while reducing communication load by more than 64.6%. This method ensures deterministic transient response for wafer transfer robots, significantly improving disturbance rejection and communication efficiency.