<p>The performance of an X-ray grating interferometry system depends on the geometry and quality of the gratings. Fabrication of micrometer-pitch high-aspect-ratio gold gratings, which are essential for measuring small refraction angles at higher energies, is challenging. The two widely used technologies for manufacturing gratings are based on gold electroplating in polymeric or silicon templates. Here, gratings manufactured by both approaches were inspected using conventional microscopy, X-ray synchrotron radiography, and computed laminography to extract characteristic features of the gratings profile to be modeled accurately. These models were used in a wave-propagation simulation to predict the effects of the gratings’ geometry and defects on the quality of a Talbot-Lau interferometer in terms of visibility and absorption capabilities. The simulated outcomes of grating features produced with both techniques could eventually be observed and evaluated in a table-top Talbot-Lau-Interferometer.</p>

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Quantifying grating defects in X-ray Talbot-Lau interferometry through a comparative study of two fabrication techniques

  • Alexandre Pereira,
  • Simon Spindler,
  • Zhitian Shi,
  • Lucia Romano,
  • Michał Rawlik,
  • Federica Marone,
  • Daniel Josell,
  • Martin Stauber,
  • Marco Stampanoni

摘要

The performance of an X-ray grating interferometry system depends on the geometry and quality of the gratings. Fabrication of micrometer-pitch high-aspect-ratio gold gratings, which are essential for measuring small refraction angles at higher energies, is challenging. The two widely used technologies for manufacturing gratings are based on gold electroplating in polymeric or silicon templates. Here, gratings manufactured by both approaches were inspected using conventional microscopy, X-ray synchrotron radiography, and computed laminography to extract characteristic features of the gratings profile to be modeled accurately. These models were used in a wave-propagation simulation to predict the effects of the gratings’ geometry and defects on the quality of a Talbot-Lau interferometer in terms of visibility and absorption capabilities. The simulated outcomes of grating features produced with both techniques could eventually be observed and evaluated in a table-top Talbot-Lau-Interferometer.