<p>The exact pull-in threshold for single-degree-of-freedom actuator models arising in the design of micro-electro-mechanical systems (MEMS) is derived analytically by studying exact solutions to trinomial equations of arbitrary degree. In the case of magnetic actuation (magMEMS), the exact pull-in threshold is expressed in terms of the Lambert W function, while in the case of actuation inversely proportional to the positive power of distance, the closed form of the dynamic pull-in threshold is expressed in terms of infinite series or Gaussian hypergeometric functions. Periodic and pull-in solutions for various excitation parameters and actuation exponents are numerically illustrated.</p>

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Generalized analysis of dynamic pull-in for singular magMEMS and MEMS oscillators

  • Piotr Skrzypacz,
  • Grant Ellis,
  • Bartosz Pruchnik,
  • Piotr Putek

摘要

The exact pull-in threshold for single-degree-of-freedom actuator models arising in the design of micro-electro-mechanical systems (MEMS) is derived analytically by studying exact solutions to trinomial equations of arbitrary degree. In the case of magnetic actuation (magMEMS), the exact pull-in threshold is expressed in terms of the Lambert W function, while in the case of actuation inversely proportional to the positive power of distance, the closed form of the dynamic pull-in threshold is expressed in terms of infinite series or Gaussian hypergeometric functions. Periodic and pull-in solutions for various excitation parameters and actuation exponents are numerically illustrated.