<p>Ultrafast lasers have led to numerous advances across science and technology: they enabled corneal surgery<sup><CitationRef CitationID="CR1">1</CitationRef></sup>, revealed chemical reaction dynamics<sup><CitationRef CitationID="CR2">2</CitationRef></sup> and triggered the development of optical atomic clocks<sup><CitationRef CitationID="CR3">3</CitationRef></sup>. Over the past decades, extensive efforts have aimed to realize mode-locked lasers based on photonic integrated circuits (PICs) that are compact, manufactured at wafer scale and are compatible with further on-chip functionalities<sup><CitationRef AdditionalCitationIDS="CR5" CitationID="CR4">4</CitationRef>–<CitationRef CitationID="CR6">6</CitationRef></sup>. Yet, existing demonstrations to date lack the pulse energy required to drive nonlinear processes, such as supercontinuum generation. Here we demonstrate a mode-locked laser that overcomes this challenge through the use of erbium-ion-implanted silicon nitride PICs<sup><CitationRef CitationID="CR7">7</CitationRef></sup>. The laser is based on the Mamyshev oscillator architecture<sup><CitationRef CitationID="CR8">8</CitationRef></sup>, in which alternating spectral filtering and self-phase modulation enable mode-locking and can support large nonlinear phase shifts<sup><CitationRef CitationID="CR9">9</CitationRef></sup>. It operates without external seeding, delivering a 176-MHz pulse train with nanojoule pulse energy, comparable with fibre lasers and exceeding previous PIC-based sources by two orders of magnitude. The output exhibits high coherence, can be linearly compressed to 147 fs and can directly drive a 1.5-octave-spanning supercontinuum in a Si<sub>3</sub>N<sub>4</sub> waveguide, without any further amplification. A compact terahertz time-domain spectrometer driven by this source achieved a bandwidth of 5 THz and a 90-dB dynamic range. We demonstrate its application in non-contact chemical analysis and inspection. Our results show the potential of an integrated ultrafast laser, with applications ranging from chip-scale frequency metrology to portable spectroscopy systems.</p>

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High-pulse-energy integrated mode-locked laser using a Mamyshev oscillator

  • Zheru Qiu,
  • Xuan Yang,
  • Xurong Li,
  • Jianqi Hu,
  • Zhongshu Liu,
  • Yichi Zhang,
  • Xinru Ji,
  • Jiale Sun,
  • Grigory Lihachev,
  • Zihan Li,
  • Ulrich Kentsch,
  • Tobias J. Kippenberg

摘要

Ultrafast lasers have led to numerous advances across science and technology: they enabled corneal surgery1, revealed chemical reaction dynamics2 and triggered the development of optical atomic clocks3. Over the past decades, extensive efforts have aimed to realize mode-locked lasers based on photonic integrated circuits (PICs) that are compact, manufactured at wafer scale and are compatible with further on-chip functionalities46. Yet, existing demonstrations to date lack the pulse energy required to drive nonlinear processes, such as supercontinuum generation. Here we demonstrate a mode-locked laser that overcomes this challenge through the use of erbium-ion-implanted silicon nitride PICs7. The laser is based on the Mamyshev oscillator architecture8, in which alternating spectral filtering and self-phase modulation enable mode-locking and can support large nonlinear phase shifts9. It operates without external seeding, delivering a 176-MHz pulse train with nanojoule pulse energy, comparable with fibre lasers and exceeding previous PIC-based sources by two orders of magnitude. The output exhibits high coherence, can be linearly compressed to 147 fs and can directly drive a 1.5-octave-spanning supercontinuum in a Si3N4 waveguide, without any further amplification. A compact terahertz time-domain spectrometer driven by this source achieved a bandwidth of 5 THz and a 90-dB dynamic range. We demonstrate its application in non-contact chemical analysis and inspection. Our results show the potential of an integrated ultrafast laser, with applications ranging from chip-scale frequency metrology to portable spectroscopy systems.