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<p>On-chip blue lasers are essential for data storage, quantum photonics, optical communications and lab-on-chip sensing. Existing GaN-based devices deliver high performance but demand lattice-matched substrates, involve complex architectures and suffer from high optical losses in the visible range. Here we extend the CMOS-compatible fabrication methodology used to incorporate emitting colloidal quantum dots (QDs) with silicon nitride (SiN<sub><i>x</i></sub>) platforms from proven red and green to blue lasers. Implementing QD design rules for optimal gain performance, we obtain blue-emitting ZnSe/ZnS QDs with gain metrics on par with established red and green QDs. After encapsulating QD films with an organic/inorganic bilayer, we demonstrate stable lasing under femtosecond and nanosecond pumping using different cavity designs. Such films, coated on low-loss SiN<sub><i>x</i></sub> two-dimensional photonic crystal cavities, yield out-of-plane lasing between 425 and 445 nm, with quasi-continuous-wave thresholds of 7.5 kW cm<sup>−</sup><sup>2</sup>. In addition, in-plane, waveguide-coupled lasing is demonstrated by depositing ZnSe/ZnS QD films on top of a one-dimensional distributed feedback cavity. Our work underscores the potential of non-toxic, solution-processable ZnSe-based QDs for integrated blue photonics.</p>

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Integrated blue ZnSe/ZnS quantum dot lasers on a silicon nitride platform

  • 期刊论文

  • 发表日期：

    2026年7月27日

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  • Jinhua He,
  • Korneel Molkens,
  • Dries Van Thourhout,
  • Pieter Geiregat,
  • Zeger Hens,
  • Ivo Tanghe

摘要

On-chip blue lasers are essential for data storage, quantum photonics, optical communications and lab-on-chip sensing. Existing GaN-based devices deliver high performance but demand lattice-matched substrates, involve complex architectures and suffer from high optical losses in the visible range. Here we extend the CMOS-compatible fabrication methodology used to incorporate emitting colloidal quantum dots (QDs) with silicon nitride (SiNx) platforms from proven red and green to blue lasers. Implementing QD design rules for optimal gain performance, we obtain blue-emitting ZnSe/ZnS QDs with gain metrics on par with established red and green QDs. After encapsulating QD films with an organic/inorganic bilayer, we demonstrate stable lasing under femtosecond and nanosecond pumping using different cavity designs. Such films, coated on low-loss SiNx two-dimensional photonic crystal cavities, yield out-of-plane lasing between 425 and 445 nm, with quasi-continuous-wave thresholds of 7.5 kW cm−2. In addition, in-plane, waveguide-coupled lasing is demonstrated by depositing ZnSe/ZnS QD films on top of a one-dimensional distributed feedback cavity. Our work underscores the potential of non-toxic, solution-processable ZnSe-based QDs for integrated blue photonics.