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<p>Freestanding functional membranes open a promising avenue to the fabrication of flexible electronic devices. To date, research has mainly focused on perovskite-like oxides with pseudocubic structures. Investigation of freestanding hexagonal oxide materials is severely restricted due to the lack of a proper sacrificial layer. Here we present our discovery of water-soluble crystalline hexagonal BaAl<sub>2</sub>O<sub>4</sub>, which can serve as an excellent sacrificial layer for obtaining membranes with six-fold or three-fold symmetry. Remarkably, BaAl<sub>2</sub>O<sub>4</sub> can rapidly dissolve in water (&lt;1 min), but is stable in air, O<sub>2</sub> and NH<sub>3</sub>, even at very high temperatures, thus allowing in situ or ex situ growth of high-quality materials for integrated devices. To demonstrate the generic nature of this sacrificial layer, we tested a large collection of oxide and nitride films, including YMnO<sub>3</sub> (0001), LiCoO<sub>2</sub> (0001), α-Fe<sub>2</sub>O<sub>3</sub> (0001), In<sub>2</sub>O<sub>3</sub> (111), NiO (111), β-Ga<sub>2</sub>O<sub>3</sub> (<InlineEquation ID="IEq1"> <EquationSource Format="TEX">\(\bar{2}01\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mover accent="true"> <mn>2</mn> <mo>¯</mo> </mover> <mn>01</mn> </mrow> </math></EquationSource> </InlineEquation>) and TiN (111). Furthermore, integrated devices based on such crystalline membranes demonstrate a substantially improved performance.</p>

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Water-soluble hexagonal BaAl2O4 as sacrificial layer for freestanding crystalline membranes and flexible devices

  • 期刊论文

  • 发表日期：

    2026年1月29日

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  • Mengcheng Li,
  • Chao Lu,
  • Yuqian Wang,
  • Haoyang Cheng,
  • Jinling Zhou,
  • Jiachang Bi,
  • Lei Gao,
  • Qinghua Zhang,
  • Nan Liu,
  • Pengyu Liu,
  • Lu Wang,
  • Caiyong Li,
  • Jiayi Song,
  • Xiangyu Lyu,
  • Mingtong Zhu,
  • Jin Liu,
  • Faran Zhou,
  • Ailing Ji,
  • Jimin Zhao,
  • Peng Jiang,
  • Na Li,
  • Liang Si,
  • Yanwei Cao,
  • Peigang Li,
  • Lin Gu,
  • Pu Yu,
  • Guangyu Zhang,
  • Zexian Cao,
  • Nianpeng Lu

摘要

Freestanding functional membranes open a promising avenue to the fabrication of flexible electronic devices. To date, research has mainly focused on perovskite-like oxides with pseudocubic structures. Investigation of freestanding hexagonal oxide materials is severely restricted due to the lack of a proper sacrificial layer. Here we present our discovery of water-soluble crystalline hexagonal BaAl2O4, which can serve as an excellent sacrificial layer for obtaining membranes with six-fold or three-fold symmetry. Remarkably, BaAl2O4 can rapidly dissolve in water (<1 min), but is stable in air, O2 and NH3, even at very high temperatures, thus allowing in situ or ex situ growth of high-quality materials for integrated devices. To demonstrate the generic nature of this sacrificial layer, we tested a large collection of oxide and nitride films, including YMnO3 (0001), LiCoO2 (0001), α-Fe2O3 (0001), In2O3 (111), NiO (111), β-Ga2O3 ( \(\bar{2}01\) 2 ¯ 01 ) and TiN (111). Furthermore, integrated devices based on such crystalline membranes demonstrate a substantially improved performance.