<p>Ultra-wide bandgap semiconductors exhibit advantageous electronic properties that make them promising for high-voltage, high-power electronics applications. Building on over a decade of progress in material growth and device fabrication, discrete ultra-wide bandgap devices with power-switching capacities up to the kilowatt level have been recently demonstrated. However, a packaged, multi-die ultra-wide bandgap power module – essential for further power scaling toward industrial, biomedical, grid, and aerospace applications – has yet to be realized. Here, we present a flip-chip packaged gallium oxide power module capable of 1000 A, 1000 V pulsed power switching with fast speed and minimal reverse recovery, advancing the power capacity of ultra-wide bandgap electronics by over two orders of magnitude. To address challenges posed by high electric fields and transient power surges, we employ a high-permittivity interface design enabling device-package electrothermal co-optimization. This optimization maximizes the module’s transient thermal performance and enables full exploitation of the high volumetric heat capacity of gallium oxide—a largely untapped advantage in prior device development—alongside its high-temperature stability. The optimized ultra-wide bandgap module achieves over 1.8 MW/cm<sup>2</sup> pulsed power capacity density, outperforming silicon and wide-bandgap semiconductor counterparts and suggesting the promise of ultra-wide bandgap electronics in next-generation high-power systems.</p>

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A megawatt ultra-wide bandgap semiconductor module for pulsed power electronics

  • Hehe Gong,
  • Xin Yang,
  • Boyan Wang,
  • Zichen Zhang,
  • Qingrui Yuchi,
  • Zineng Yang,
  • Matthew Porter,
  • Hongchang Cui,
  • Yuan Qin,
  • Rong Zhang,
  • Han Wang,
  • Dong Dong,
  • Jiandong Ye,
  • Guo-Quan Lu,
  • Yuhao Zhang

摘要

Ultra-wide bandgap semiconductors exhibit advantageous electronic properties that make them promising for high-voltage, high-power electronics applications. Building on over a decade of progress in material growth and device fabrication, discrete ultra-wide bandgap devices with power-switching capacities up to the kilowatt level have been recently demonstrated. However, a packaged, multi-die ultra-wide bandgap power module – essential for further power scaling toward industrial, biomedical, grid, and aerospace applications – has yet to be realized. Here, we present a flip-chip packaged gallium oxide power module capable of 1000 A, 1000 V pulsed power switching with fast speed and minimal reverse recovery, advancing the power capacity of ultra-wide bandgap electronics by over two orders of magnitude. To address challenges posed by high electric fields and transient power surges, we employ a high-permittivity interface design enabling device-package electrothermal co-optimization. This optimization maximizes the module’s transient thermal performance and enables full exploitation of the high volumetric heat capacity of gallium oxide—a largely untapped advantage in prior device development—alongside its high-temperature stability. The optimized ultra-wide bandgap module achieves over 1.8 MW/cm2 pulsed power capacity density, outperforming silicon and wide-bandgap semiconductor counterparts and suggesting the promise of ultra-wide bandgap electronics in next-generation high-power systems.