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<p>Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems—including cold atoms, ions, and solid-state color centers—presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology operating in the visible to near-infrared wavelength range. We introduce a scalable modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200 mm diameter silicon wafers with CMOS-compatible processes. We present a proof-of-concept device with 4&#xa0;×&#xa0;4 individually addressable 50 <i>μ</i>m&#xa0;×&#xa0;50 <i>μ</i>m pixels or channels, each containing a resonant waveguide grating with a &#xa0;~&#xa0;780 nm design wavelength, supporting &#xa0;&gt;&#xa0;100 MHz modulation speeds, and a spectral response with &#xa0;&gt;&#xa0;20 dB extinction.</p>

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Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年11月26日

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  • Tom Vanackere,
  • Artur Hermans,
  • Ian Christen,
  • Christopher Panuski,
  • Mark Dong,
  • Matthew Zimmermann,
  • Hamza Raniwala,
  • Andrew J. Leenheer,
  • Matt Eichenfield,
  • Gerald Gilbert,
  • Dirk Englund

摘要

Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems—including cold atoms, ions, and solid-state color centers—presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology operating in the visible to near-infrared wavelength range. We introduce a scalable modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200 mm diameter silicon wafers with CMOS-compatible processes. We present a proof-of-concept device with 4 × 4 individually addressable 50 μm × 50 μm pixels or channels, each containing a resonant waveguide grating with a  ~ 780 nm design wavelength, supporting  > 100 MHz modulation speeds, and a spectral response with  > 20 dB extinction.