<p>Chemical vapor deposition (CVD) has been the prevailing approach to synthesize high-quality 2D molybdenum disulfide (MoS<sub>2</sub>) for electronic devices. However, it typically requires a high synthetic temperature (e.g., 400-900 ˚C) and is thus costly and incompatible with flexible plastic substrates. Here we report the low-thermal-budget (e.g., at room temperature) solution-based deposition of high-mobility wafer-scale semiconducting MoS<sub>2</sub> thin films, enabled by a polymer-free alkylammonium-capped MoS<sub>2</sub> ink. In contrast to conventional long-chain polymer surfactants, the compact alkylammonium ligands exhibit adequate binding to MoS<sub>2</sub> and can be washed away by solvent to restore atomically clean and organics-free MoS<sub>2</sub> thin films. Therefore, the polymer-free ink provides a potential solution to the long-standing trade-off between thermal budget and electrical performance in MoS<sub>2</sub>. We show room-temperature-processed MoS<sub>2</sub> thin films exhibiting an average electron mobility of 50 cm<sup>2</sup>·V<sup>-1</sup>·s<sup>-1</sup>, which can be further improved to 68 cm<sup>2</sup>·V<sup>-1</sup>·s<sup>-1</sup> with 200 °C processing. The resulting transistors show a high degree of uniformity and can be readily implemented for scalable logic integration, ring oscillators, and driving circuits for organic light-emitting diodes. Especially, the fabricated MoS<sub>2</sub> ring oscillator outputs an oscillation frequency of &gt; 300 kHz, showing promising applications in functional circuits based on layered semiconductors.</p>

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Room-temperature solution processing of high-mobility MoS2 thin films

  • Junying Xue,
  • Tingyi Xia,
  • Tong Li,
  • Jing He,
  • Shengqi Wang,
  • Wenjie Li,
  • Jifeng Ge,
  • Ruihao Tan,
  • Yongping Dai,
  • Qiyuan He,
  • Na Li,
  • Guangyu Zhang,
  • Xiangfeng Duan,
  • Zhaoyang Lin

摘要

Chemical vapor deposition (CVD) has been the prevailing approach to synthesize high-quality 2D molybdenum disulfide (MoS2) for electronic devices. However, it typically requires a high synthetic temperature (e.g., 400-900 ˚C) and is thus costly and incompatible with flexible plastic substrates. Here we report the low-thermal-budget (e.g., at room temperature) solution-based deposition of high-mobility wafer-scale semiconducting MoS2 thin films, enabled by a polymer-free alkylammonium-capped MoS2 ink. In contrast to conventional long-chain polymer surfactants, the compact alkylammonium ligands exhibit adequate binding to MoS2 and can be washed away by solvent to restore atomically clean and organics-free MoS2 thin films. Therefore, the polymer-free ink provides a potential solution to the long-standing trade-off between thermal budget and electrical performance in MoS2. We show room-temperature-processed MoS2 thin films exhibiting an average electron mobility of 50 cm2·V-1·s-1, which can be further improved to 68 cm2·V-1·s-1 with 200 °C processing. The resulting transistors show a high degree of uniformity and can be readily implemented for scalable logic integration, ring oscillators, and driving circuits for organic light-emitting diodes. Especially, the fabricated MoS2 ring oscillator outputs an oscillation frequency of > 300 kHz, showing promising applications in functional circuits based on layered semiconductors.