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<p>The assembling and reconfiguration of the integrated devices are of great importance to extend the capability of photonic chips based on top-down fabrication approaches. Here, we demonstrate a fully-programmable organic micro-actuator for precise manipulation of on-chip microstructures. Controlled by a low-power laser, the micro-actuator achieves a 30 nm motion step size, and shows the capability to traverse various chip substrates, overcome obstacles, and push microspheres to target locations. The micro-actuator is applied to fine-tune the microcavity and shift the resonance by three linewidths without compromising its quality factor. This optically-driven micro-actuator offers a unique approach for post-fabrication assembly and reconfiguration of photonic circuits, paving the way for adaptive, multifunctional photonic systems.</p>

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Optically-driven organic nano-step actuator for reconfigurable photonic circuits

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年9月2日

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  • Ji-Zhe Zhang,
  • Xin-Biao Xu,
  • Yanjun Gong,
  • Zhu-Bo Wang,
  • Xiao-Zhuo Qi,
  • Xiao-Jing Liu,
  • Yuan-Hao Yang,
  • Zheng-Hui Tian,
  • Jia-Qi Wang,
  • Yan-Lei Zhang,
  • Ming Li,
  • Yongxian Guo,
  • Yingde Yan,
  • Chun-Hua Dong,
  • Xi-Feng Ren,
  • Yifan Zhang,
  • Chuang Zhang,
  • Guang-Can Guo,
  • Yanke Che,
  • Chang-Ling Zou

摘要

The assembling and reconfiguration of the integrated devices are of great importance to extend the capability of photonic chips based on top-down fabrication approaches. Here, we demonstrate a fully-programmable organic micro-actuator for precise manipulation of on-chip microstructures. Controlled by a low-power laser, the micro-actuator achieves a 30 nm motion step size, and shows the capability to traverse various chip substrates, overcome obstacles, and push microspheres to target locations. The micro-actuator is applied to fine-tune the microcavity and shift the resonance by three linewidths without compromising its quality factor. This optically-driven micro-actuator offers a unique approach for post-fabrication assembly and reconfiguration of photonic circuits, paving the way for adaptive, multifunctional photonic systems.