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<p>Wide-range and high-sensitivity hydrogen sensors are critically important for hydrogen safety in aerospace and advanced transportation sectors. This work demonstrates a thermal-conductivity surface acoustic wave (SAW) based sensor to achieve high sensitivity hydrogen sensing. By integrating thermal balance and acoustic wave equations, a precise mechanistic model elucidating the structure-activity relationships among gas flow rate, operating temperature, and MEMS architecture in determining sensing sensitivity is constructed. Guided by this model, the SAW hydrogen sensor with on-chip microheater integration was developed. Furthermore, a highly integrated SAW hydrogen sensing system with ultra-low baseline noise (&lt;30 µV) was constructed for performance evaluation. Leveraging the exceptional thermal sensitivity of the SAW device and system stability, the optimized sensor achieves wide detection range (up to 100% vol), low detection limit (~6 ppm), rapid response and recovery time (T<sub>90</sub>/T<sub>10</sub>: ~15 s), excellent repeatability (error&lt;2.4%) at a relatively low operating temperature (120 °C). The prepared SAW sensor provides an effective solution for hydrogen leakage monitoring across unprecedented concentrations (ppm-100% vol), establishing a new paradigm for hydrogen safety applications.</p><p></p>

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High sensitivity SAW hydrogen gas sensor based on thermal conductivity effect

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2026年2月27日

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  • Baile Cui,
  • Lina Cheng,
  • Xufeng Xue,
  • Jing Jin,
  • Lintaihui Huang,
  • Yong Liang,
  • Wen Wang

摘要

Wide-range and high-sensitivity hydrogen sensors are critically important for hydrogen safety in aerospace and advanced transportation sectors. This work demonstrates a thermal-conductivity surface acoustic wave (SAW) based sensor to achieve high sensitivity hydrogen sensing. By integrating thermal balance and acoustic wave equations, a precise mechanistic model elucidating the structure-activity relationships among gas flow rate, operating temperature, and MEMS architecture in determining sensing sensitivity is constructed. Guided by this model, the SAW hydrogen sensor with on-chip microheater integration was developed. Furthermore, a highly integrated SAW hydrogen sensing system with ultra-low baseline noise (<30 µV) was constructed for performance evaluation. Leveraging the exceptional thermal sensitivity of the SAW device and system stability, the optimized sensor achieves wide detection range (up to 100% vol), low detection limit (~6 ppm), rapid response and recovery time (T90/T10: ~15 s), excellent repeatability (error<2.4%) at a relatively low operating temperature (120 °C). The prepared SAW sensor provides an effective solution for hydrogen leakage monitoring across unprecedented concentrations (ppm-100% vol), establishing a new paradigm for hydrogen safety applications.