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<p>This paper reports a high performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves. Through theoretical and simulation analysis, the influence of key parameters such as the spacing between anode and cathode, depth of microgrooves and the distribution of vias on the performance of the hydrophone was determined. By using the new microgroove structures, micron-scale anode and cathode spacing was realized and effective cathode areas were greatly enlarged and eventually increased the sensitivities of the hydrophones. Furthermore, a force-balanced negative feedback system was designed to expand the effective working band of the vector hydrophone. The characterization results indicated that the device had ~2 times higher original sensitivities and wider -3dB-bandwidth than that of existing devices. The above results show that the vector hydrophone developed in this work has a wide application scenarios in the field of underwater sound detections.</p>

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High-performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年11月12日

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  • Honghao Zhang,
  • Yulan Lu,
  • lintao Hu,
  • Qinghua Liu,
  • Wenlang Zhao,
  • Hongmin Jiang,
  • Maoqi Zhu,
  • Zhenyu Sun,
  • Guangyang Gou,
  • Deyong Chen,
  • Junbo Wang

摘要

This paper reports a high performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves. Through theoretical and simulation analysis, the influence of key parameters such as the spacing between anode and cathode, depth of microgrooves and the distribution of vias on the performance of the hydrophone was determined. By using the new microgroove structures, micron-scale anode and cathode spacing was realized and effective cathode areas were greatly enlarged and eventually increased the sensitivities of the hydrophones. Furthermore, a force-balanced negative feedback system was designed to expand the effective working band of the vector hydrophone. The characterization results indicated that the device had ~2 times higher original sensitivities and wider -3dB-bandwidth than that of existing devices. The above results show that the vector hydrophone developed in this work has a wide application scenarios in the field of underwater sound detections.