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<p>Recent advancements in mobile communication have escalated the demand for faster data rates, requiring higher carrier frequencies and compact, high-performance, and low-cost radio frequency (RF) filters. Micro-acoustic resonators offer significant advantages in mobile phone filtering due to their low loss and compact size. Addressing the need for low-cost filter solutions for higher frequencies, this study presents a silicon-substrate-based surface acoustic wave (SAW) technology platform to enable high-performance resonators and filters for 6G X-band (7–12 GHz) centimeter-wave (cmWave) wireless communications. Based on a silicon (Si) substrate, we propose a novel design scheme to excite shear vertical surface acoustic waves (SV-SAW) on a 128°Y LiNbO<sub>3</sub>/SiO<sub>2</sub>/poly-Si/Si layer stack and realize high-frequency resonators above 6 GHz with high-performance: electromechanical coupling coefficient (<i>k</i><sup>2</sup>) of 7.6% ~ 8.9% and high-quality factor (<i>Q</i>) ranging from 193–679. The synthesized filters based on those high-performance resonators show low insertion loss (1.47 to 2.20 dB) and 3-dB bandwidth from 308 to 373 MHz. Especially, the demonstrated filter with a center frequency (<i>f</i><sub><i>c</i></sub>) at 8.63 GHz exhibits a low insertion loss of only 1.5 dB, which is the best when compared to all other LiNbO<sub>3</sub> acoustic filters in this frequency range, 3-dB bandwidth of 373 MHz, and decent out-of-band rejection across the entire 1–15 GHz range. These results mark a significant step forward for the microwave acoustics field and pave the way for enabling solidly-mounted, low-cost, and miniature-size SAW filters for emerging 6G cmWave wireless communications.</p><p></p>

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SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications

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  • 出版模式：

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  • 发表日期：

    2025年5月8日

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  • Kai Yang,
  • Jie Chen,
  • Juan Wang,
  • Fuhong Lin,
  • Jiming Fang,
  • Meijuan Li,
  • JunYan Zheng,
  • Zijun Ren,
  • Fangsheng Qian,
  • Haiding Sun,
  • Yansong Yang,
  • Chengjie Zuo

摘要

Recent advancements in mobile communication have escalated the demand for faster data rates, requiring higher carrier frequencies and compact, high-performance, and low-cost radio frequency (RF) filters. Micro-acoustic resonators offer significant advantages in mobile phone filtering due to their low loss and compact size. Addressing the need for low-cost filter solutions for higher frequencies, this study presents a silicon-substrate-based surface acoustic wave (SAW) technology platform to enable high-performance resonators and filters for 6G X-band (7–12 GHz) centimeter-wave (cmWave) wireless communications. Based on a silicon (Si) substrate, we propose a novel design scheme to excite shear vertical surface acoustic waves (SV-SAW) on a 128°Y LiNbO3/SiO2/poly-Si/Si layer stack and realize high-frequency resonators above 6 GHz with high-performance: electromechanical coupling coefficient (k2) of 7.6% ~ 8.9% and high-quality factor (Q) ranging from 193–679. The synthesized filters based on those high-performance resonators show low insertion loss (1.47 to 2.20 dB) and 3-dB bandwidth from 308 to 373 MHz. Especially, the demonstrated filter with a center frequency (fc) at 8.63 GHz exhibits a low insertion loss of only 1.5 dB, which is the best when compared to all other LiNbO3 acoustic filters in this frequency range, 3-dB bandwidth of 373 MHz, and decent out-of-band rejection across the entire 1–15 GHz range. These results mark a significant step forward for the microwave acoustics field and pave the way for enabling solidly-mounted, low-cost, and miniature-size SAW filters for emerging 6G cmWave wireless communications.