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<p>Ultrasonic sensors are widely used for object detection and localization in underwater and biological settings. The operational range and spatial resolution are inherently limited by sensor sensitivity, in which conventional piezoelectric transducers have been overwhelmed by advanced photonic sensors. Here, we demonstrate an optomechanical ultrasonic sensor integrated into a photonic platform, which comprises a suspended SiO<sub>2</sub> membrane embedded with a high-<i>Q</i> Si<sub>3</sub>N<sub>4</sub> microring resonator. By exploiting simultaneous optical and mechanical resonances, the sensor achieves a record low noise-equivalent pressure (NEP) of 218 nPa Hz<sup>−1/2</sup> at 289 kHz in air and 9.6 nPa Hz<sup>−1/2</sup> at 52 kHz in water. We demonstrate its versatility through photoacoustic gas spectroscopy in air and underwater ultrasound imaging, achieving a minimum detectable C<sub>2</sub>H<sub>2</sub> concentration of 2.9 ppm (integration time 1 s) and an imaging resolution of 1.89 mm, respectively. Our work represents a significant advancement in compact CMOS-compatible ultrasound sensing, unlocking new possibilities in biomedical imaging, environmental monitoring, industrial testing, and underwater communications.</p>

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Integrated optomechanical ultrasonic sensors with nano-Pascal-level sensitivity

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2026年3月16日

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  • Xuening Cao,
  • Hao Yang,
  • Min Wang,
  • Zhi-Gang Hu,
  • Zu-Lei Wu,
  • Yuanlei Wang,
  • Jian-Fei Liu,
  • Xin Zhou,
  • Jincheng Li,
  • Chenghao Lao,
  • Qi-Fan Yang,
  • Bei-Bei Li

摘要

Ultrasonic sensors are widely used for object detection and localization in underwater and biological settings. The operational range and spatial resolution are inherently limited by sensor sensitivity, in which conventional piezoelectric transducers have been overwhelmed by advanced photonic sensors. Here, we demonstrate an optomechanical ultrasonic sensor integrated into a photonic platform, which comprises a suspended SiO2 membrane embedded with a high-Q Si3N4 microring resonator. By exploiting simultaneous optical and mechanical resonances, the sensor achieves a record low noise-equivalent pressure (NEP) of 218 nPa Hz−1/2 at 289 kHz in air and 9.6 nPa Hz−1/2 at 52 kHz in water. We demonstrate its versatility through photoacoustic gas spectroscopy in air and underwater ultrasound imaging, achieving a minimum detectable C2H2 concentration of 2.9 ppm (integration time 1 s) and an imaging resolution of 1.89 mm, respectively. Our work represents a significant advancement in compact CMOS-compatible ultrasound sensing, unlocking new possibilities in biomedical imaging, environmental monitoring, industrial testing, and underwater communications.