<p>Lithium niobate (LiNbO<sub>3</sub>) crystals have been the focus of substantial research due to their applications in, for example, optical and surface-acoustic-wave devices at room temperature. Moreover, they are attractive for use as high-temperature resonant sensors or mechanical actuators, where acoustic losses are less significant due to the high piezoelectric coefficients in LiNbO<sub>3</sub> compared to non-polar piezoelectric crystals such as quartz or langasite-related compounds. So far, high-temperature charge transport in LiNbO<sub>3</sub> has been examined only to a limited extent as a function of oxygen partial pressure (<InlineEquation ID="IEq6"> <EquationSource Format="TEX">\(p_{\text{O}_2}\)</EquationSource> </InlineEquation>). Furthermore, an explicit correlation between acoustic losses and charge transport at low <InlineEquation ID="IEq7"> <EquationSource Format="TEX">\(p_{\text{O}_2}\)</EquationSource> </InlineEquation> has, to the best of our knowledge, not yet been established or published. In this study, the correlation between acoustic losses and electrical conductivity of 3.5 MHz LiNbO<sub>3</sub> thickness-shear mode resonators is investigated over a wide <InlineEquation ID="IEq9"> <EquationSource Format="TEX">\(p_{\text{O}_2}\)</EquationSource> </InlineEquation> range from 10<sup>−20</sup> to 10<sup>−4</sup> bar at a temperature of ≈ 700 <sup>°</sup>C. To describe the losses, a physical model of a vibrating plate is introduced. The key parameter, i.e., the electrical conductivity, is included as measured. The model function is optimized using a least-squares method by varying only the piezoelectric coefficient and the dielectric constant. Good agreement with the data is achieved. Remarkably, the <InlineEquation ID="IEq10"> <EquationSource Format="TEX">\(p_{\text{O}_2}\)</EquationSource> </InlineEquation>-dependent conductivity and, therefore, the underlying hopping of small electron polarons govern the overall loss at low <InlineEquation ID="IEq11"> <EquationSource Format="TEX">\(p_{\text{O}_2}\)</EquationSource> </InlineEquation>. Furthermore, a <InlineEquation ID="IEq12"> <EquationSource Format="TEX">\(p_{\text{O}_2}\)</EquationSource> </InlineEquation>-dependent dielectric constant is required to describe the losses appropriately.</p>

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Oxygen partial pressure dependent acoustic loss in piezoelectric LiNbO3 resonators at 700 °C

  • Hendrik Wulfmeier,
  • Uliana Yakhnevych,
  • Yuri Suhak,
  • Lars Dörrer,
  • Harald Schmidt,
  • Holger Fritze

摘要

Lithium niobate (LiNbO3) crystals have been the focus of substantial research due to their applications in, for example, optical and surface-acoustic-wave devices at room temperature. Moreover, they are attractive for use as high-temperature resonant sensors or mechanical actuators, where acoustic losses are less significant due to the high piezoelectric coefficients in LiNbO3 compared to non-polar piezoelectric crystals such as quartz or langasite-related compounds. So far, high-temperature charge transport in LiNbO3 has been examined only to a limited extent as a function of oxygen partial pressure ( \(p_{\text{O}_2}\) ). Furthermore, an explicit correlation between acoustic losses and charge transport at low \(p_{\text{O}_2}\) has, to the best of our knowledge, not yet been established or published. In this study, the correlation between acoustic losses and electrical conductivity of 3.5 MHz LiNbO3 thickness-shear mode resonators is investigated over a wide \(p_{\text{O}_2}\) range from 10−20 to 10−4 bar at a temperature of ≈ 700 °C. To describe the losses, a physical model of a vibrating plate is introduced. The key parameter, i.e., the electrical conductivity, is included as measured. The model function is optimized using a least-squares method by varying only the piezoelectric coefficient and the dielectric constant. Good agreement with the data is achieved. Remarkably, the \(p_{\text{O}_2}\) -dependent conductivity and, therefore, the underlying hopping of small electron polarons govern the overall loss at low \(p_{\text{O}_2}\) . Furthermore, a \(p_{\text{O}_2}\) -dependent dielectric constant is required to describe the losses appropriately.