Fabrication of 3D micro-structures using two-photon lithography technology
摘要
The two-photon lithography (TPL) process has become an advanced technique for the fabrication of high-resolution three-dimensional microstructures. The TPL process has the potential for various applications, from semiconductors to bio, optics, and microfluidics. Despite the ability to fabricate 3D microstructure, the TPL process has challenges in productivity and accessibility due to the high cost of equipment and the low production speed compared to conventional methods such as the MEMS process. As the TPL process is developing, it is expected to become an innovative, high-tech manufacturing method for various 3D microstructures. Moreover, these 3D microstructures can be applied across diverse industrial fields, including biotechnology, semiconductors, and optics.
Graphical abstract