Design of a MEMS-Based Low Stiffness Accelerometer for Measuring Gravitational Anomalies

This paper introduces a novel MEMS-based low-g accelerometer designed specifically for gravimetric applications aimed at measuring Earth’s gravitational anomalies. The proposed device, with dimensions of 9 mm x 9 mm x 0.025 mm, offers compactness without compromising precision, boasting a noise density of 10.4 µg/√Hz crucial for detecting subtle gravitational variations.

Central to its design is the implementation of a unique architecture featuring variable width curved beams, strategically optimized to enhance sensitivity and overall performance. Validation of the proposed design was carried out through extensive simulations using Ansys, providing valuable insights into its behavior under different gravitational acceleration ranges and facilitating refinement for optimal performance.

Engineered for active operation within the ± 1 g range, it exhibits peak responses between 973 and 998 Gals, ensuring compatibility with typical anomaly magnitudes encountered in geophysical studies.

Through these simulations and analysis, the MEMS-based accelerometer demonstrates significant potential for accurately measuring gravitational anomalies, advancing geophysical research and Earth science exploration.