Piezoceramic Stick–Slip Actuator with Nanometer Displacement Resolution for Liquid Bridge Stretching

Numerous devices for precise positioning have been designed and developed using piezoelectric actuators. Most of these devices either feature complex control systems or have a limited travel range. Devices that do not have distance limitations generally incorporate guideways to achieve their positioning capabilities. While piezoelectric actuators offer high precision, the complexity of control mechanisms and the constraint on travel distance are significant considerations. Consequently, systems without travel limitations often rely on guideways to maintain precision over longer distances, balancing the need for both extended range and precise control.

This work aims to design and fabricate a simple, compact piezoelectric inertial slider that enables continuous motion without compromising resolution. The inertial slider's mechanical construction and peripheral electronics are straightforward, and its motion is generated through the stick-slip friction principle. This design ensures a balance between simplicity and functionality, providing precise, continuous movement with minimal complexity. By leveraging the stick-slip phenomenon, the device achieves high resolution and efficient operation, making it a practical solution for applications requiring precise positioning.

The inertial slider achieves displacements as small as 1 nm and up to 5 nm at speeds of 350 μm/s, offering exceptional precision and efficiency. It can carry loads ten times its weight and operate on inclined planes with angles from − 9° to 9°, showcasing impressive load-bearing capabilities. This versatility and robustness make it ideal for precise positioning and movement control tasks, even on challenging surfaces. Its design ensures reliable performance across various operational conditions, making it a valuable tool in precision engineering and related fields.