Structural and Dielectric Properties of Fe-Doped Cobalt Oxide (Fe: Co3O4) Thin Films Synthesized by Pulsed Spray Pyrolysis
摘要
Pure and Fe-doped cobalt oxide (Co3O4) thin films were synthesized using a simple pulsed spray pyrolysis (PSP) technique, employing an aqueous solution of cobalt acetate tetrahydrate as the cobalt source. The films were deposited on glass substrates maintained at a temperature of 450 °C and a spray time of 30 min. The study investigated the effects of Fe doping with different concentrations on the prepared films’ structural, morphological, and dielectric properties. The crystalline structure and valence states of both the pure and Fe-doped samples were analyzed by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). A field emission scanning electron microscope (FESEM) was also used to examine the surface morphology with the integrated energy-dispersive X-ray analysis (EDX) unit to investigate the elemental composition of the deposited films. The dielectric measurements revealed that Fe doping enhanced the permittivity (