<p>Microtextured surfaces, such as those with groove, hole, or protrusion structures, are widely used in various industries for bonding dissimilar materials because of their anchor effect, which enhances adhesion and penetration with other materials. Although surfaces with grooves and protrusions are expected to show higher bonding strength, it is difficult to fabricate such hybrid structures using a material removal process or additive manufacturing. This study established a new burnishing method using a tool with preformed microgrooves at the tip to fabricate groove-with-protrusion structures on metal surfaces by plastic deformation. The tip of a ball-shaped polycrystalline diamond (PCD) tool was irradiated with a femtosecond pulsed laser to generate multiple trapezoid ten-micron scale grooves. Burnishing was then conducted on an oxygen-free copper surface to investigate the characteristics and mechanism of the burnishing-induced plastic deformation behaviors. The results showed that protrusions and grooves, which were several tens of micrometers in height and depth, were simultaneously produced along the tool path on the material surface. Tool sliding on the workpiece induced shear stress, which mainly triggered dislocation movement and plastic deformation enhancement. Cross-sectional observation revealed that grain elongation and refinement remarkably increased with the burnishing depth, indicating that the shear stress from burnishing produced refined grains that flowed and formed the protrusions. This research demonstrates the feasibility of a highly efficient method for simultaneously generating groove-with-protrusion structures with enhanced surface properties.</p>