Developments in low-temperature plasma applications in Asia
摘要
Low-temperature plasmas, also known as non-thermal plasmas, are partially ionized gases whose electron temperatures are much higher than those of the ions and neutrals. Furthermore, gaseous molecules are partly dissociated, and the degree of dissociation is orders of magnitude larger than that calculated from the Boltzmann distribution at a given gas temperature. This distinguishing characteristic allows low-temperature plasma (LTP) to have diverse uses in many fields, including medical and biological, agriculture, environmental, and electronics and semiconductor applications. Applications of LTP have been increasing worldwide, but in this particular topic, we will focus on the advances in LTP applications in Asia.