Practical classical molecular dynamics simulations for low-temperature plasma processing: a review

Molecular dynamics simulations are becoming a powerful tool for examining and predicting atomic and molecular processes in various environments. The present review showcases how molecular dynamics simulations can provide valuable insights into various processes in the fields of plasma physics, chemistry, and interactions with materials and liquids. Some notable processes include gas phase polymerization, deposition, plasma-catalysis, discharge breakdown, and vibrational excitation.