A broadband hard x-ray reflectometer for reflectivity characterization of hard x-ray mirror
摘要
To meet the high-energy reflectivity characterization requirements of optical coatings for the Wide-band X-ray Polarimetry Telescope (WXPT) project, it is necessary to develop a broadband hard X-ray reflectometer based on an X-ray tube source. The system is designed to accurately measure the X-ray reflectivity of depth-graded multilayers over a wide energy range at specific grazing-incidence angles.
MethodsThe W/Si depth-graded multilayers were measured using the reflectometer to obtain continuous-spectrum reflectivity at grazing-incidence angles of 0.10°–0.30° over the energy range of 25–80 keV. In addition, complementary characterization techniques, including morphology analysis and Rutherford Backscattering Spectrometry (RBS), were employed to cross-validate the multilayer structure.
Results and conclusionsThe results indicate that the layer thickness profile follows the intended power-law distribution without significant drift, although the overall thickness is approximately 6.0% thinner than the designed value. Measured interfacial roughness is effectively controlled below 4.00 Å. In terms of density, the fitted average density of the W layers is 18.51 g/cm3, which is approximately 3.8% lower than the designed bulk density. The energy-dependent reflectivity curves measured by the reflectometer are in good agreement with those acquired via a synchrotron radiation source, confirming the reliability of the experimental platform. The reflectometer system enables timely feedback for the subsequent development of optical coatings and offers valuable data for the optimization of coating processes.