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<p>Using a highly sensitive flexible sensor for monitoring the rapidly fluctuating thermal environments of underwater hot springs is a highly promising temperature measurement technology. Herein, a flexible high-temperature sensor was designed, using conductive ITO and sensitive In<sub>2</sub>O<sub>3</sub> as the sensing layers. These materials were deposited on a polyimide film substrate and encapsulated with PET material to enable <i>in situ</i> temperature monitoring of rapidly changing thermal environments in underwater hot springs. Simulation results showed that the device achieved a sensitivity of 179.6 µV/°C during rapid cooling from various temperatures to 25 °C without applied pressure, and exhibited a maximum output variation of 5.76% under the same cooling conditions under 20 MPa, reflecting excellent thermal response stability. Furthermore, combined simulation and experimental results indicated that the serpentine electrode structure in the sensor effectively reduced internal stress, enabling it to maintain stable output after 10,000 mechanical bending cycles, thereby demonstrating excellent structural stability and repeatability. Further tests showed that the device maintained stable thermoelectric output over a wide temperature range of 30–300 °C and exhibited excellent performance in various media, including air (flame heating), water, seawater, and high-temperature silicone oil. Notably, after continuous operation in seawater for 20 h and immersion for 48 h, the average variation in the thermoelectric output curve was only 1.94%, demonstrating good corrosion resistance and long-term stability. These characteristics indicate that significant potential is possessed by the flexible sensor for temperature monitoring applications in the extreme thermal environments of underwater hot springs.</p>

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Highly sensitive flexible high-temperature sensor based on ITO/In2O3 for underwater hot spring monitoring

  • 期刊论文

  • 发表日期：

    2025年9月15日

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  • Shilong Liu,
  • Shuntao Hu,
  • Qingfei Wu,
  • Jun Chen,
  • Qi Wen,
  • Wenbiao Zhang,
  • Shuai Ren,
  • Ying Li,
  • Zhenyin Hai,
  • Junyang Li

摘要

Using a highly sensitive flexible sensor for monitoring the rapidly fluctuating thermal environments of underwater hot springs is a highly promising temperature measurement technology. Herein, a flexible high-temperature sensor was designed, using conductive ITO and sensitive In2O3 as the sensing layers. These materials were deposited on a polyimide film substrate and encapsulated with PET material to enable in situ temperature monitoring of rapidly changing thermal environments in underwater hot springs. Simulation results showed that the device achieved a sensitivity of 179.6 µV/°C during rapid cooling from various temperatures to 25 °C without applied pressure, and exhibited a maximum output variation of 5.76% under the same cooling conditions under 20 MPa, reflecting excellent thermal response stability. Furthermore, combined simulation and experimental results indicated that the serpentine electrode structure in the sensor effectively reduced internal stress, enabling it to maintain stable output after 10,000 mechanical bending cycles, thereby demonstrating excellent structural stability and repeatability. Further tests showed that the device maintained stable thermoelectric output over a wide temperature range of 30–300 °C and exhibited excellent performance in various media, including air (flame heating), water, seawater, and high-temperature silicone oil. Notably, after continuous operation in seawater for 20 h and immersion for 48 h, the average variation in the thermoelectric output curve was only 1.94%, demonstrating good corrosion resistance and long-term stability. These characteristics indicate that significant potential is possessed by the flexible sensor for temperature monitoring applications in the extreme thermal environments of underwater hot springs.