Research on the Vibration Control of Micro-Vibration Using a Novel Hybrid Isolator

To address the challenge of micro-vibration impacting the performance of precision instruments and equipment, this study proposes a hybrid vibration isolation system. The system integrates air springs in series with piezoelectric actuators to enhance isolation effectiveness. The passive components’ spring-damping characteristics are utilized for rapid attenuation of high-frequency vibrations, while the active components are employed to suppress low-frequency resonances of the isolator. To test the effectiveness of the hybrid isolation scheme, a control system and experimental setup were designed for validation. First, the passive performance was tested to highlight the strengths and weaknesses of passive isolation. Next, active control was introduced to evaluate the robustness of the control and the effectiveness of parameter estimation. Finally, through hybrid experiments, the root mean square and amplitude spectrum of acceleration were measured and calculated before and after control, and compared with the performance during passive isolation. The results indicate that the introduction of active control significantly improved the deficiencies of passive isolation, broadened the isolation bandwidth, and prevented system divergence under impulsive disturbances. Therefore, this design scheme is feasible, offering a wide isolation frequency range, rapid response, and strong robustness.